Analysis of a Thermal Plasma Diamond CVD System
نویسندگان
چکیده
منابع مشابه
Thermal plasma synthesis of diamond
A numerical model was used to examine experimental data in which a gas chromatograph measured the composition of gas sampled through a 70-pn orifice in the growth substrate during atmospheric-pressure RF plasma diamond CVD. Substantial discrepancies were found between the measurements and the predicted species mole fractions at the surface, but the data were in much better accord with predicted...
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ژورنال
عنوان ژورنال: Acta Polytechnica
سال: 2001
ISSN: 1805-2363,1210-2709
DOI: 10.14311/250